<sputterguy>
i got an ion beam sputtering system that has dielectric targets
<sputterguy>
do i need to do anything special to get them loaded in the system? i am only used to sputtering metals
<azonenberg>
Are you using DC or RF?
<azonenberg>
I know you get all kinds of charging if you try to DC sputter a dielectric but afaik it's fine if you are using RF since you charge and discharge every half-cycle
<sputterguy>
azonenberg: i believe it's dc only, but this is dc ion beam sputtering
<azonenberg>
I'm not familiar with ion beam sputtering as opposed to normal magnetron sputtering
<azonenberg>
If the current is only running in one direction you can expect the target to build up a charge and not sputter anymore
<azonenberg>
Pulsing may help to work around that
<sputterguy>
ion beam sputtering involves using a stream of ions to hit the target to dislodge material that is then accelerated using an electric field towards the sample
<sputterguy>
are there more channels like this?
<sputterguy>
this isn't exactly home or cmos
<sputterguy>
is there like a promatsci or something?
<azonenberg>
Not that i know of, this is the de facto microfab channel on freenode