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<
kimjongun>
what do you all think of vacuum annealing? is inert gas annealing better?
<
azonenberg>
Are you talking for diffusion?
<
kimjongun>
like to relieve stress
<
azonenberg>
or RTA after ion implantation
<
kimjongun>
i'm new sorry. rta?
<
azonenberg>
rapid thermal anneal
<
kimjongun>
hmm okay
<
azonenberg>
And well, i have never done vacuum anneals
<
azonenberg>
most of my work so far has been MEMS
<
azonenberg>
so i dont do any doping yet
<
azonenberg>
when i do dope it will be surface diffusions from doped spin-on glass
<
azonenberg>
(in air)
<
azonenberg>
Since i'll do an HF strip anyway i dont care about the surface oxidizing
<
azonenberg>
and the SOG will be a partial diffusion barrier
<
azonenberg>
if i did need to do a non-oxidizing furnace run i'd use Ar most likely
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