Topic for #homecmos is now Homebrew CMOS and MEMS foundry design | http://code.google.com/p/homecmos/ | Logs: http://en.qi-hardware.com/homecmos-logs/
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<nmz787> anyone need FIB work done?
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<nmz787> anyone around?
<azonenberg> yep
<azonenberg> and no, i have no immediate short-term need for a FIB
<nmz787> have you used one?
<azonenberg> No, I've done a decent amount of SEM work and am currently learning TEM though
<azonenberg> And I have things in mind that a FIB would be useful for but don't have the need just yet
<azonenberg> Do you own one or just have access to it?
<nmz787> hmm, i'm thinking of using this FIB for making lithography masks for microfluidics
<azonenberg> I think that's massive overkill
<nmz787> but I'm looking for a way to reduce the jagged edges since its raster CNC
<azonenberg> fluidic masks don't need to be that small
<azonenberg> so using a fib is a waste of time and money
<nmz787> yeah but I think its cheap, and quick too
<azonenberg> cheap?? quick??
<azonenberg> no way
<azonenberg> not any fib i've ever heard of
<azonenberg> if you want cheap, quick masks at micron-scale features check out a place like laserlab.com
<nmz787> the guy who is gonna let me use his said free/cheap, and that he engraved the entire bible in about 1 sq inch in an afternoon
<nmz787> yeah I think you may have told me about laser lab
<nmz787> but even that will still have jagged edges I think
<nmz787> so still would be interested in a way to blur that step
<azonenberg> Yes, but they're dirt cheap - like $50 for a mask the size of a large sheet of paper at 3.125um lambda
<azonenberg> Do you need truly rounded edges or are diagonals OK?
<azonenberg> 45deg bends etc
<nmz787> right but for my fluidics a jagged edge can mean a local pressure drop which can them make salts fall out of solution and a seed crystal develop which will change the volume and restriction
<azonenberg> Also, look at the details of the etch processing etc after the mask
<nmz787> well the edges between pixels is what i'm worried about
<azonenberg> Your pixels will be rounded, not perfectly square
<nmz787> unless the beam is twice the dpi
<azonenberg> Choose a mask resolution smaller than your etch resolution
<nmz787> i mean the beam is twice the diameter of center to center pixel spacing
<azonenberg> that's what it comes down to
<azonenberg> then you'll end up low-pass filtering off all of the high frequency noise
<nmz787> so what do you mean my etch res?
<azonenberg> Well, the sum total of your photoresist, developing, and etch process will have some limiting resolution
<nmz787> i was planning on doin contact lithography with photoresin, then curing, then pouring PDMS over that and peeling back when cured
<azonenberg> So what is the smallest feature you can actually produce doing this?
<nmz787> maybe i could etch the cured resist
<nmz787> then pour PDMS
<nmz787> well the FIB can do like 20nm or something like that
<azonenberg> Yeah
<azonenberg> But you wont get 20nm with contact litho
<azonenberg> lol
<nmz787> maybe smaller than that
<nmz787> nah
<nmz787> i only need maybe 1 micron
<azonenberg> So set your mask resolution to be maybe 500nm then
<nmz787> but I'd like the edge between pixels to be smooth as possible
<nmz787> ok so the FIB makes dots at 500nm spacing
<azonenberg> I am almost certain that if you do contact litho and have 500nm noise that it will blur out unless you deliberately try to get super sharp focus
<azonenberg> and for your needs, you dont want that
<nmz787> what controls the blur
<nmz787> i guess that's what i'm looking for
<azonenberg> Lots of factors, things like the photoresin you're using
<nmz787> just diffraction?
<azonenberg> How long you develop
<azonenberg> Diffraction
<azonenberg> Distance from mask to wafer/substrate
<azonenberg> Thickness of your resist
<nmz787> would there be more blur with longer or shorter develop time?
<azonenberg> If you develop longer, there will be a tendency to attack very thin features
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<nmz787> hmm, ok
<nmz787> well that's enough for me to think about for now
<nmz787> let me know if you have any FIB ideas, I was thinking fresnel lens mold masters, so I could make a magnifying lens
<nmz787> just for fun, but maybe it could be some $ making gimmick
<nmz787> fresnel lens for your microbible
<azonenberg> Lol
<azonenberg> If you can do small chrome-on-glass masks that would be nice, but I suspect that the fib will cost more to operate than you anticipate
<nmz787> i have no idea what the operating costs are
<nmz787> the guy says he charges $375/hr to customers
<nmz787> but if I was playing around on my own he could do way cheaper
<azonenberg> That sounds about right, maybe a little on the high side
<nmz787> like 10X cheaper
<azonenberg> I can get time on the one at RPI for $188.50/hr as an outside industrial user
<azonenberg> or, if i was on a sponsored research project, my grant would be billed at $45/hr
<nmz787> yeah I just moved to portland OR, and have been looking for industry open labs
<azonenberg> that's a flat rate for the cleanroom, includes use of any tool there
<nmz787> really want metrology access
<azonenberg> We have a really nice FESEM in the cleanroom here (zeiss supra 55)
<nmz787> i used a really sweet white light interferometer at RIT that just shot out 3D profiles
<azonenberg> There's also a bunch of scopes in the matsci department that are outside the cleanroom that are much cheaper to get time on
<azonenberg> $45/hr for the jeol JSM-840 which is a dinosaur but good enough for a lot of stuff
<azonenberg> 65/hr for the FESEM
<azonenberg> and they have a bunch of TEMs which i'm just learning how to use for a class but don't anticipate actually using in any of my work
<nmz787> you might look into temwindows.com and their parent site simpore.com
<nmz787> i was thinking about using them for protein sieves
<nmz787> when working with DNA and protein reactors
<azonenberg> interesting
<nmz787> but if I get going with this FIB, I might be able to make small enough pores that would work, I'm not sure
<azonenberg> well for the class i'm only using premade tem samples
<nmz787> they say they can control the pore size well
<azonenberg> and i dont anticipate using it myself outside of class
<nmz787> within like 10 or 15 nm of your specified diameter
<azonenberg> and FIBing pores sounds very expensive
<nmz787> bbl
<Sync> yeah that seems to be inefficient
<AdrianG> what is the meaning of this