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B0101>
azonenberg: when you do etching, does organic contaminants seriously affect the etch process?
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azonenberg>
Depends on what you're etching
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azonenberg>
and what levels of contamination
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azonenberg>
an RCA clean beforehand never hurts unless you have metal interconnect
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Sync_>
murphy struck again btw
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Sync_>
vented chamber to fix issue, baked chamber, degassed sources, noticed that si is almost empty
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azonenberg>
Si empty?
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azonenberg>
as in SiH4?
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Sync_>
no, the si evaporator
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Sync_>
the chamber has two electron beam evaps, one with Ge and one with Si and well .. after 5 years si ran out
<
Sync_>
I might be able to melt the stuff on the walls of the crucible in the middle but uhhh
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Sync_>
the chamber pressure is not going to be happy
<
azonenberg>
oh, i thought you loaded the crucible separately for each sample
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