Topic for #homecmos is now Homebrew CMOS and MEMS foundry design | http://code.google.com/p/homecmos/ | Logs: http://en.qi-hardware.com/homecmos-logs/
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<B0101> azonenberg: when you do etching, does organic contaminants seriously affect the etch process?
<azonenberg> Depends on what you're etching
<azonenberg> and what levels of contamination
<azonenberg> an RCA clean beforehand never hurts unless you have metal interconnect
<Sync_> yeah
<Sync_> murphy struck again btw
<Sync_> vented chamber to fix issue, baked chamber, degassed sources, noticed that si is almost empty
<Sync_> m(
<azonenberg> Si empty?
<azonenberg> as in SiH4?
<Sync_> no, the si evaporator
<Sync_> the chamber has two electron beam evaps, one with Ge and one with Si and well .. after 5 years si ran out
<Sync_> I might be able to melt the stuff on the walls of the crucible in the middle but uhhh
<Sync_> the chamber pressure is not going to be happy
<azonenberg> lol
<azonenberg> oh, i thought you loaded the crucible separately for each sample
<Sync_> no
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