azonenberg changed the topic of #homecmos to: Homebrew CMOS and MEMS foundry design | Wiki: http://homecmos.drawersteak.com/wiki/Main_Page | Repository: http://code.google.com/p/homecmos/ | Logs: http://en.qi-hardware.com/homecmos-logs/
<azonenberg> nmz787: isotropic etches for silicon?
<azonenberg> your options are, basically
<azonenberg> HF + strong oxidizer
<azonenberg> or SF6 plasma
<nmz787> azonenberg: someone on mems-list said DRIE without side-wall passivation, same thing as SF6 plasma?
<azonenberg> nmz787: DRIE is normally alternating steps of SF6 plasma and some kind of fluorine-based passivation
<azonenberg> i forget what the base is but it ends up being essentially PECVD teflon
<nmz787> what's easiest?
<nmz787> is DRIE cheap?
<nmz787> i wouldn't need much, i think, 1 micron deep to start
<nmz787> this local lab would let me use their lab for $20/hr, spin coater, fume hood, solvent cabinet and address for delivery, already have HF
<nmz787> they also have a FIB, but that's another pricing scheme that is a bit blurry
<nmz787> (not sure if any of their chems are still 'good') or if they go bad
<Sync__> doing DRIE at home is not the cheapest thing to do
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<lkcl_> kanzure: :)
<nmz787> no i wouldn't do either at home
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<kanzure> lkcl_: sup
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