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azonenberg>
New blog post, going to try updating it more often
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azonenberg>
It's not directly related to fab but close enough i figured i'd post it
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azonenberg>
First attempt at "wet DRIE"
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azonenberg>
more precisely high aspect ratio wet etching using a process loosely based on Bosch
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azonenberg>
notice the wavy sidewalls
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azonenberg>
this was three steps of coat PR/expose/develop and HCl:H2O2 isotropic wet etch
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azonenberg>
requires precise mask alignment but theoretically allows higher aspect ratios
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