<azonenberg>
Just finished some more extensive resolution testing work
<azonenberg>
20 micron process is getting extremely good yields now on small dies
<azonenberg>
But 5um is still proving to be beyond my reach
<wolfspraul>
azonenberg: hey, this may be slightly off-topic or off-interest to you, but let me just paste the url in a good faith effort to connect similar minded people :-)
<wolfspraul>
complements your amazing project, imho
<azonenberg>
yeah, looks nice
<wolfspraul>
he's going through the tools, costs, considerations, etc.
<azonenberg>
yeah
<berndj>
azonenberg, those lines look nice and clean; are those 20µm lines?
<azonenberg>
Yes
<azonenberg>
Nominally, at least
<azonenberg>
exact dimension may be off by a few %
<azonenberg>
i havent measured with my calibrated camera yet
<azonenberg>
the point-and-shoot is used for in-process imaging as its easier to set up
<berndj>
but also, i can see how 5µm is giving trouble
<azonenberg>
Yeah
<azonenberg>
I plan to keep pushing just to try, but all of my short-term projects will use 20
<berndj>
do those lines act as a diffraction grating?
<berndj>
i mean, that you can see it
<azonenberg>
My guess is, in the IR it probably would
<azonenberg>
but in visible, not sure
<azonenberg>
I havent etched the underlying silicon yet either
<azonenberg>
The goal was to use the copper pattern as a hardmask for KOH etch
<azonenberg>
and do 20um trenches
<azonenberg>
But i have a lecture to give tomorrow for the crypto class i'm TAing for (prof is at a conference) and I need to spend some time going over the notes lol
<azonenberg>
In any case, these results are very encouraging as far as the 20um process is concerned
<azonenberg>
I have a few bugs to iron out but the comb drive is looking quite feasible
<azonenberg>
imagine this pattern etched vertically into <110> Si
<azonenberg>
through the wafer
<azonenberg>
then half connected to each side...
<azonenberg>
It might require tiling a few exposures at the current FOV of my system but at 5 mins per exposure i can handle doing four or five
<bart416>
lol, I think I need to go and see a doctor :|
<bart416>
My resting heart rate is now officially under 50 bpm, lol
<bart416>
I've either been listening to too much bob marley, been doing too much sports or have a heart defect
<azonenberg>
lol
<B0101>
Hi
<bart416>
azonenberg, 47 bpm while laying down
<bart416>
weeeeeeeeeeeeeeeeeeeee!
<azonenberg>
o_O
<bart416>
lol
<bart416>
Nah, it's fairly normal for me I think
<bart416>
I often run for 1-2 hours a day...
<CIA-67>
homecmos r120 | wiki/Vendors.wiki | Edited wiki page 'Vendors' through web user interface.
<bart416>
azonenberg, any suggestion on how to protect the photoresist from binding to the metal ions?
<bart416>
Cause by all means I'll be attacking it chemically when I attack the acrylic
<azonenberg>
bart416: explain what you are trying to do again
<azonenberg>
I know the theory, but give me a process outline
<azonenberg>
what substances you apply to what parts of the sample in what order
<bart416>
I'm still trying to figure out the substances
<azonenberg>
In other news i have a time slot reserved on the SEM next tuesday morning at 10 am my time
<azonenberg>
to do cross section and low-angle imaging of 20um features for measuring etch profiles
<bart416>
azonenberg, are you familiar with basic organic chemistry?
<azonenberg>
Um, no :p
<azonenberg>
not even close
<azonenberg>
i know very little chem and even less ochem lol
<berndj>
47bpm? maybe you should become an astronaut
<bart416>
berndj, why is that?
<bart416>
47 bpm is either too low or athlete's heart from what I know
<berndj>
oh? i didn't know that counted as "too low"
<bart416>
Under 50 is considered dangerous generally
<bart416>
Mind you, there have been people who had 30 bpm while being perfectly healthy
<berndj>
is athlete's heart the name of some heart disease?
<bart416>
it's a condition
<bart416>
not so much a disease
<berndj>
but if you run 1-2 hours every day i wouldn't be too surprised about a super low heart rate
<bart416>
And that's the most creepy picture I've ever uploaded I think
<azonenberg>
what is it?
<bart416>
the infected wound
<azonenberg>
from what i mean
<bart416>
Dunno
<bart416>
Just suddenly had that wound
<bart416>
I do loads of things that can lead to this
<azonenberg>
lol i see
<azonenberg>
Its just that usually when i get injured i have some idea of how it happened
<bart416>
I've worked in construction for a while during the summers to earn some extra money
<bart416>
You stop noticing injuries after a while
<azonenberg>
i see
<azonenberg>
i've done my share of manual labor and construction (plumbing, drywall, light framing of non-load-bearing walls) but nothing i'd call heavy construction
<bart416>
I've taken down buildings, industrial cleaning, etc...