balrog changed the topic of #homecmos to: Homebrew CMOS and MEMS foundry design | Wiki: https://github.com/homecmos/homecmos-wiki | Repositories: https://github.com/homecmos/ | Logs: http://en.qi-hardware.com/homecmos-logs/
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<john_cephalopoda> "The electrocomposer, an electron beam rapid tracing system of integrated circuit masks"
<john_cephalopoda> Can't find the article openly anywhere.
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<john_cephalopoda> 2.5 µm resolution is possible with that device.
<john_cephalopoda> But it is probably not easily available to amateurs and most likely super-expensive.
<sync> it's just a SEM
<john_cephalopoda> But they do lithography for photo masks with it somehow.
<john_cephalopoda> I think that one college guy who makes masks with a DLP also has a SEM, but I haven't seen things being done with it yet.
<sync> you can pattern resist with the ebeam in the sem
<sync> it is not magic
<sync> the reason why people do not like it is because it is incredibly slow
<sync> as you need to get relatively high doses into the resist
<john_cephalopoda> According to the paper "A 75 x 75 mm mask can be traced on resin in less than 17 min."
<john_cephalopoda> (Or actually the abstract)
<john_cephalopoda> In addition to that, you could combine it with soft lithography. Creating the template in the SEM, then transferring it to the stamp.
<john_cephalopoda> If that would work, you would have a pretty long time to get started but would then use the stamps to pattern all wafers in a very small time.
<pie_> sync, oh hey youre back :)
<pie_> could long patterning time have environmental stability issues, or not yet at this scale?
<sync> it is not like I was gone
<sync> stamping is a fun idea but has practical issues
<sync> 17 mins for 75x75mm is just not economically viable anymore
<sync> you can do that relatively easy with laser exposure and then optical reduction
<john_cephalopoda> sync: I am glad if I get any pattering done within my lifetime, which is ~28908000 more minutes :þ
<sync> then just do it optically
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<Noxz> TheCephalopod, PMMA (poly-meth-methacrylate) is sensitive to E-Beam lithography
<Noxz> I was actually trying to think about vibration isolators lately, and if making one (DIY) would be cost effective or simply find some on ebay
<Noxz> because the length of time e-beam takes, you need to have a stable table