<john_cephalopoda>
2.5 µm resolution is possible with that device.
<john_cephalopoda>
But it is probably not easily available to amateurs and most likely super-expensive.
<sync>
it's just a SEM
<john_cephalopoda>
But they do lithography for photo masks with it somehow.
<john_cephalopoda>
I think that one college guy who makes masks with a DLP also has a SEM, but I haven't seen things being done with it yet.
<sync>
you can pattern resist with the ebeam in the sem
<sync>
it is not magic
<sync>
the reason why people do not like it is because it is incredibly slow
<sync>
as you need to get relatively high doses into the resist
<john_cephalopoda>
According to the paper "A 75 x 75 mm mask can be traced on resin in less than 17 min."
<john_cephalopoda>
(Or actually the abstract)
<john_cephalopoda>
In addition to that, you could combine it with soft lithography. Creating the template in the SEM, then transferring it to the stamp.
<john_cephalopoda>
If that would work, you would have a pretty long time to get started but would then use the stamps to pattern all wafers in a very small time.
<pie_>
sync, oh hey youre back :)
<pie_>
could long patterning time have environmental stability issues, or not yet at this scale?
<sync>
it is not like I was gone
<sync>
stamping is a fun idea but has practical issues
<sync>
17 mins for 75x75mm is just not economically viable anymore
<sync>
you can do that relatively easy with laser exposure and then optical reduction
<john_cephalopoda>
sync: I am glad if I get any pattering done within my lifetime, which is ~28908000 more minutes :þ
<sync>
then just do it optically
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<Noxz>
TheCephalopod, PMMA (poly-meth-methacrylate) is sensitive to E-Beam lithography
<Noxz>
I was actually trying to think about vibration isolators lately, and if making one (DIY) would be cost effective or simply find some on ebay
<Noxz>
because the length of time e-beam takes, you need to have a stable table