balrog changed the topic of #homecmos to: Homebrew CMOS and MEMS foundry design | Wiki: https://github.com/homecmos/homecmos-wiki | Repositories: https://github.com/homecmos/ | Logs: http://en.qi-hardware.com/homecmos-logs/
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<Noxz> any known companies that will etch or pattern a MEMS/CMOS device? ie, I can etch it myself, but if I give a pattern, like back/white bitmap to some company, can they photoresist coat + expose for me?
<Noxz> or maybe simply making the mask
<Noxz> the chromium stuff/whatever is expensive though, from what I understand
<Noxz> maybe that DLP method is worth looking into
<Noxz> my initial plan was to do e-beam lithograp h y, but I am miles away from even looking at t hat
<john_cephalopoda> There is a company that can make masks
<Noxz> is it $$$$$ ?
<Noxz> the initial issue is actually: will the mask work
<Noxz> or rather, will the device work
<Noxz> I also have some piezo stages.. I wonder how difficult it would be to accurately beam an exposure to the pattern I want
<Noxz> so, for reference, I am (now) a watchmaking student, and I am very interested in distributed compliant mechanisms - which is essentially what MEMS is in the end
<john_cephalopoda> Hmm, I am looking for the site right now
<Noxz> having a mask made would be more for a production run
<Noxz> not a hobbyist
<Noxz> so, maybe I asked about it wrong
<john_cephalopoda> I think it was called "Laserlabs"
<Noxz> more of: what is the easiest(/cheapest??) way to expose
<Noxz> and, like I said, I have piezo stages.. the issue is the accuracy of the movement
<Noxz> so, something like a DRO or similar
<Noxz> I know there are laser based DRO stuff.. I should look into them
<Noxz> btw, the movement is like 25mm
<Noxz> most DROs are for big lathes or mills like bridgeports
<john_cephalopoda> Several methods to get a pattern onto photoresist have been tried out by amateurs. All of the ones I have heard about use a microscope.
<john_cephalopoda> Basically you shine a light through a maks. The light pattern then goes "backwards" through a microscope onto the photoresist.
<Noxz> robot fighting thing going on today, I may head out soon and come back at noon to walk the dog, then head out again
<Noxz> hrm, I think I read that method
<Noxz> hrm, DRO made from digital calipers.. that's one way
<john_cephalopoda> First option: You can aim a laser through the microscope and draw lines and patterns directly (direct-write lithography)
<john_cephalopoda> Second option: You can let some company manufacture a small pattern and shine a light through it.
<Noxz> direct-write was my main goal initially
<Noxz> that way you skip the whole pattern making step
<Noxz> that high school kid used some DLP projector method, I wasnt familiar with it at first
<john_cephalopoda> Third option: You use a projector to project an image through the microscope.
<john_cephalopoda> I haven't got any experience with any of those methods, I'm pretty new to all of that, too.
<Noxz> my non-amateur method I was chasing was e-beam from a SEM
<john_cephalopoda> This paper (also linked in the wiki) about direct-write lithography might be interesting: https://gmwgroup.harvard.edu/pubs/pdf/757.pdf
<john_cephalopoda> Oh, wait, this is about projection
<john_cephalopoda> http://ma.ecsdl.org/content/MA2012-02/59/3990.full.pdf <-- That's the direct-write one
<john_cephalopoda> The microscope positioning can be controlled pretty well with the knobs. I wonder if driving those mechanically would allow for reliable direct-write lithography.
<Noxz> depends how good you are at etch-a-sketch :P
<Noxz> I have a stepper controller, so I can rig it up to do all that for me
<Noxz> but yeah, microscope is certainly a method
<john_cephalopoda> It shouldn't be too hard to get access to a microscope.
<john_cephalopoda> According to the old wiki, you can get photoresist at http://www.injectorall.com/
<Noxz> since I will be doing MEMS style stuff, I may be looking at purchasing SU-8
<Noxz> pricey, but known to work very well
<Noxz> orig I was looking at PMMA based photoresist for e-beam
<Noxz> I'm getting ready to hop on the bus for this robot thing, catch you later
<john_cephalopoda> See you
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<Noxz> that was fun, I got to see War Hawk up close
<john_cephalopoda> Watchmaking sounds like an interesting career.
<Noxz> if you can squint for 8hrs a day, sure
<john_cephalopoda> I am studying computer science. I squint at a screen 16 hours a day ;)
<john_cephalopoda> Oh, nice battle robots. I used to hang out in a channel with some guy from Finland who participated in robot battles from time to time.
<Noxz> I'm looking into DRO possibilities for the piezo stages I have
<Noxz> since they are a compliant mechanism, they sometimes miss a step
<Noxz> looking into inductive sensing for a moment
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