<Noxz>
a diaphargm shutter was more of what I had imagined, btu that's a bit of moving parts
<Noxz>
though, the article that got me into MEMS in the first place, in a Scientific American, was about distributed compliance with silicon parts, and they showed an iris
<Noxz>
relatively simple design
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<Noxz>
I could be slightly concerned that the iris shutter would still hev a tiny hole in the end, which would contribute to contams
<Noxz>
maybe one of the leafs is more oblong that does a final close off
<sync_>
you just need something to block the view of the substrate to the source
<Noxz>
right..
<Noxz>
neat, AlN can be microwave sintered, as can MgO
<Noxz>
hrm, a 3nm layer of LiF on Al lowers the work function from 4.2eV down to 2.5eV
<Noxz>
which is just under 500nm wavelength, or a green in visible spectrum
<Noxz>
LiF easily made from LiOH and HF(aq) and water has low solubility for it, so it prcpts out
<Noxz>
LiF is also microwavable as well as an additive for MgO and such for more transparent sinters
<pie__>
so i was thinking, sure you can SEM litho, but is there enough current for it to not be rediculously slow_
<Noxz>
what production speed do you want?
<Noxz>
you can do low resoltuion SEM scans at like 60hz or something, iirc
<Noxz>
30
<Noxz>
TVs do that
<pie__>
right but thats just for imaging
<Noxz>
old CRTs
<Noxz>
I have seen vids of fairly quick low res stuff
<pie__>
(idk what kind of current is needed for litho)
<pie__>
ok
<Noxz>
but if you nee dhigh res, yeah, it may take a while
<pie__>
if it works it works
<Noxz>
yeah, I havent really looked into it too much at all
<Noxz>
I know PMMA works with e-bram though
<Noxz>
that's about it
<Noxz>
also, I wonder how 'straight'/vertical the exposure is from a SEM
<Noxz>
becomes diagonal when out of the center line
<Noxz>
doesnt matter for thin PR, but if you are doing electroforming it may matter
<pie__>
hm
<pie__>
yeah for some reason i just figured the sample gets steppered
<pie__>
am i the dumbs? :P
<Noxz>
steppered?
<pie__>
on that note that doesnt make sense does it
<pie__>
(i had a course on imaging, forgot what it was called, but had to stop half way for family reasons0
<pie__>
Noxz, having the sample platform moved with a stepper below the beam
<pie__>
or rather having the beam moved
<Noxz>
right, that's how I will initially do it
<Noxz>
with piezo stages
<pie__>
but thats like just totally dumb intuition
<Noxz>
(vs steppers and micro ball-screw linear movement)
<pie__>
because whats the point of all the EM lenses? :P
<Noxz>
I was also told to move the stage, not the laser
<Noxz>
some people even said dont turn the laser off if you dont need to
<pie__>
hm right
<Noxz>
like, use another actuaator to move a mirror to reflect the light away
<pie__>
i guess i kinda mixed that up with the oother studd
<pie__>
stuff]
<Noxz>
for on/off
<pie__>
laser?
<Noxz>
the point of the em lesne/deflector is to get to a certain position, but stages will get your sample at least centered
<Noxz>
yeah, on/off of the laser via a mirror
<Noxz>
kinda mixed up two things there
<Noxz>
uv laser + piezo stages at the very start, if I need to, but piezo stages to move around
<pie__>
no i mean where is a laser in this
<Noxz>
SEM could do exposure eventually
<Noxz>
UV Laser used for SU-8 photoresist
<Noxz>
is where I was hung up on
<pie__>
oh you mean you mixed up the SEM with some other thing?
<Noxz>
and the idea of needing to make a photodiode or similar for the SEM
<Noxz>
yeah
<Noxz>
they are kinda merged though
<pie__>
photodiode for sem?
<pie__>
wat
<Noxz>
like, UV Laser can also be used to cure a PR
<pie__>
well ok but ut doenst work like a SEM..
<Noxz>
yeah.. so I am interested in using a photodiode + laser to make electrons fly off
<Noxz>
vs a tungsten wire tht is heated
<pie__>
oh jut for the e source?
<Noxz>
Yeah, electron gun
<Noxz>
that's what I have been researching fo rthe past week
<Noxz>
more or less
<Noxz>
so, I was looking at an Aluminum Nitride photodiode, for UV
<pie__>
why would this be better then what you have right now?
<Noxz>
since UV has more energy, which means more eV to spin off e-
<pie__>
doesnt need replacing?
<pie__>
oh
<Noxz>
I dont have anything right now
<Noxz>
this is all on paper
<pie__>
i thought youhave a tungsten source
<Noxz>
I am about to buy a terbomolecular pump though