<azonenberg> So... current priorities
<azonenberg> building process control modules
<azonenberg> for BGA reflow (unrelated project) and my spin coater
<azonenberg> As well as probe tip etching
<azonenberg> I want to think if its possible to combine them all onto a single generic "industrial control module"
<azonenberg> with a unified API so i can tlak to them all with similar code
<B0101> Hi Azonenberg
<azonenberg> hi
<azonenberg> Any progress?
<B0101> nope
<B0101> I was sick
<B0101> didn't do any experiments
<azonenberg> A legitimate excuse lol
<azonenberg> Btw, look up the paper "Etch rates for micromachining processes, part II"
<B0101> ok
<azonenberg> Actually, why dont you set up a wiki page for "recommended reading"
<azonenberg> that paper is not one that you will read once and go "oh, cool idea"
<B0101> sure
<azonenberg> its mostly tables of numbers
<azonenberg> and discussion of results
<azonenberg> Edtremely useful reference
<azonenberg> extremely*
<azonenberg> the de facto "etch bible"
<azonenberg> covers both wet and plasma on like 90 different materials
<B0101> wow
<azonenberg> I have both a PDF and a hard copy, the hard copy is pinned up to my bulletin board above my desk
<azonenberg> i use it all the time
<azonenberg> other good references - "Tantalum oxide thin films as protective coatings for sensors" if you're using Ta2O5
<azonenberg> "Fabrication of very smooth walls and bottoms of silicon microchannels for heat dissipation of semiconductor devices" for KOH etching
<azonenberg> "Reproducible Electrochemical Etching of Tungsten Probe Tips" for making microprobes
<CIA-67> homecmos r145 | wiki/Recommendedreading.wiki | Created wiki page through web user interface.
<B0101> Gimme a few links to put up on the new page
<azonenberg> Those papers are very useful
<azonenberg> let me try to find donwload links that are public
<azonenberg> silly subscriptions
<azonenberg> "Etch rates for micromachining processing, part II" http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates2(2003).pdf
<azonenberg> 255 citations
<azonenberg> "Tantalum oxide thin films as protective coatings for sensors", http://orbit.dtu.dk/getResource?recordId=266688&objectId=1&versionId=1
<azonenberg> "Fabrication of very smooth walls and bottoms of silicon microchannels for heat dissipation of semiconductor devices" - http://linkinghub.elsevier.com/retrieve/pii/S002626920000015X
<azonenberg> unfortunately that isnt a public link
<CIA-67> homecmos r146 | wiki/Recommendedreading.wiki | Edited wiki page Recommendedreading through web user interface.
<B0101> sorry, i gtg, see you tommorrow
<azonenberg> k
<bart416> azonenberg, I might be able to get my hands on one of these: http://www.tequipment.net/LecroyWaveJet352.html
<azonenberg> Shiny
<azonenberg> 500 MHz?
<bart416> Yah
<bart416> Main issue is logistics
<bart416> I can't go and pick it up myself
<bart416> Too long of a distance
<bart416> So might have to pass on it
<bart416> But 150 euro for that thing...
<azonenberg> Used, i assume?
<azonenberg> And o_O
<bart416> Yes
<azonenberg> i have no idea what that is in USD but its cheap :p
<bart416> Used, but in good condition
<bart416> Roughly 200 USD
<azonenberg> i paid close to 1K USD for mine
<bart416> Normally you'd pay over a tenfold of that for a new one
<azonenberg> And that looks way better per channel
<azonenberg> Mine has the 16ch LA which is nice, but deep memory would help greatly
<azonenberg> for some applications
<bart416> Well, logic analyzer you can build
<bart416> Scope is a lot harder
<bart416> An FPGA, USB chip, and some buffers and you have a LA
<azonenberg> Yeah
<azonenberg> I plan to do that soon actually
<azonenberg> make one with really deep memory
<bart416> Heh, I got to play with one of those newer NAs this week
<azonenberg> Why do cheap scopes not have deep memory?
<azonenberg> its not like ddr2 is expensive
<azonenberg> you could throw a hundred megabytes on there for $10
<bart416> most scopes use static ram as far as I know though azonenberg
<bart416> well at least all the ones I've had to open up do so
<swkhan> azonenberg_work: still no wafer. what did dhl/fedex say?
<azonenberg> swkhan: it was us post office
<azonenberg> and they say it was signed for
<azonenberg> and delivered
<azonenberg> you're saying it got lost? :(
<swkhan> oh! okay, i'll check at the post office on monday then
<azonenberg> you have the tracking #, right?
<swkhan> i don't remember it. can you pm it to me?
<azonenberg> sent
<swkhan> they said it was delivered ~1 week ago?!
<azonenberg> Yes
<azonenberg> So somebody has it, apparnetly lol
<swkhan> they did make a mistake recently. they gave us some highly flammable substance that "donna ...?" owns
<swkhan> something dodecaethylthiol or something
<swkhan> we haven't tried to contact donna because we're apathetic / lazy i guess =\
<azonenberg> lol
<swkhan> grr
<swkhan> do you have much experience with a semiconductor parameter analyzer?
<azonenberg> whats that? :P
<swkhan> or a 4 point probe even?
<azonenberg> I know the idea of a 4-point probe but i havent used thm
<swkhan> it's a really fancy set of voltage sources and current sources and voltage monitors and current monitors
<azonenberg> My sheet resistance measurements to date have been no more sophisticated than "is there something conductive on top of this insulating film or not?
<swkhan> all i really need is an easy way to probe a really small metal insulator metal capacitor
<swkhan> so i have it like a crossbar +
<azonenberg> So you have two layers of metal with dielectric between them
<azonenberg> Define small
<azonenberg> 50nm? 200um?
<swkhan> larger =p
<azonenberg> >200um?
<swkhan> like maybe 500 um to 1 mm
<azonenberg> oh
<azonenberg> thats like, hand solderable
<azonenberg> lol
<swkhan> not with my hands :\
<azonenberg> What do the pads look like?
<swkhan> i don't have bond pads
<azonenberg> how do you connect to the layers?
<azonenberg> You dont have bond pads
<azonenberg> so for the top layer you just probe the metal
<swkhan> you type faster than i think
<azonenberg> Is the bottom layer bigger?
<swkhan> yes
<swkhan> well they are at like a T junction
<azonenberg> So you have two metal bars crossing at a T
<swkhan> so i have the bottom electrode shadow mask patterned horizontally
<azonenberg> the capacitor is where they overlap
<swkhan> yes
<azonenberg> And the 0.5mm figure is what exactly?
<azonenberg> the width of one bar?
<swkhan> the planar distance from where the bottom electrode is probed to where the top electrode is probed
<azonenberg> Ok
<azonenberg> So standard multimeter probes are a little big
<azonenberg> You dont have proper micropositioners i take it?
<azonenberg> If you did this'd be a solved problem
<swkhan> we have some sort of positioners but either they don't work perfectly or i stink at using them or both
<swkhan> we have tungsten probe tips that say 45 degree angle and 12 um which i assume is the tip width
<swkhan> or tip radius or tip diameter
<azonenberg> Ok
<azonenberg> 12um is plenty for this size
<azonenberg> i've done large IC components with 25um probes
<swkhan> well smaller is better. 0.5 mm is pathetic
<azonenberg> lol
<swkhan> but more important than all of that is some reproducible measurement
<azonenberg> well I've hit 20um targets with homebrewed submicron probes
<swkhan> the manipulators kind of bobble a bit when i lower or raise them
<swkhan> wow!
<azonenberg> and cheap micromanipulator 110 positioners
<swkhan> 110 dollars?
<azonenberg> no, thats the model number
<azonenberg> 110 and 210
<swkhan> oh
<azonenberg> They were around $100 each on ebay though lol
<swkhan> because ours were about 1000 each
<swkhan> maybe 100
<azonenberg> The $1K ones are overkill
<swkhan> i just remember they weren't worth whatever we paid for them
<azonenberg> most of them are good to submicron
<azonenberg> This is me hitting a bond pad on a 350nm 3-metal microcontroller (PIC12F683)
<azonenberg> with a homemade submicron tungsten tip
<swkhan> wow =)
<azonenberg> magnification is in the 60-120x range
<swkhan> grr i'm really frustrated
<azonenberg> i assume yours is similiar?
<swkhan> i thought i had a good research idea and i'm being derailed by equipment
<azonenberg> I got a fiber optic illuminator since taking this pic, huge help :P
<swkhan> ours is way uglier, smaller, and way less incapable
<azonenberg> Lol, my probing station was bought used on ebay
<azonenberg> You're saying your gear isnt as nice?
<swkhan> yes
<azonenberg> o_O
<azonenberg> sorry
<swkhan> well, i'm more irritated that the girl who set this up is totally incompetent
<azonenberg> wonders at the feasibility of making capacitors on his process now
<swkhan> and told me that she knew this machine worked
<swkhan> =\
<swkhan> i'm going to get scooped
<swkhan> i just want one paper, then i can be happy again
<azonenberg> 20um capacitors made of evaporated copper on Ta2O5 high-K dielectric
<azonenberg> maybe 50 for starters
<azonenberg> i think are entirely feasible
<azonenberg> And my probe tips were made in this apparatus http://colossus.cs.rpi.edu/pictures/2011/June/6-22-2011%20-%20lab%20work/S7300912.JPG
<azonenberg> lol
<azonenberg> standard electrolytic etching
<swkhan> wow
<swkhan> well how thick should a bond pad be by the way? how thick would your metal electrode (copper) be?
<azonenberg> Hmm, depends on the bonding process
<azonenberg> With copper its more annoying since you need a barrier layer
<azonenberg> and adhesion
<swkhan> i made mine ~100 nm each for top and electrode
<azonenberg> 100nm is fine if you are probing
<azonenberg> i think
<swkhan> i had an adhesion layer too
<azonenberg> Ta? Cr?
<swkhan> cr
<azonenberg> ti?
<azonenberg> Yeha, Cr is the de facto standard
<azonenberg> thats what i use too
<azonenberg> though i hear sputtered Ta is catching on
<swkhan> but it takes forever to sputter all this stuff
<swkhan> i was just talking to a professor about this yesterday =)
<azonenberg> I do evaporation, a nice thick film only takes a few minutes once you have decent vacuum
<swkhan> i was reading a book on electrodeposition
<swkhan> and they said that nb and v give better adhesion layers than cr or ti
<azonenberg> And like i said, thickness depends on the proces
<azonenberg> for example if you are soldering to it (flip chip bonding) you want a micron ish
<azonenberg> or it'll just dissolve into the solder
<azonenberg> and yes, i've read a little about Nb and V
<azonenberg> But they're pretty exotic
<azonenberg> and not used because while they may be better, its not by much
<swkhan> chromium can form quadruple bonds
<swkhan> my mind is still blown
<swkhan> i need to relax
<azonenberg> Thats why it sticks so well
<azonenberg> and i have homework to do but i dont want to :(
<swkhan> i'm going to a film festival with some friends. i need to take my mind off research that doesn't work
<azonenberg> Lol
<azonenberg> I think i'm going to try one of my alternative hardmasking ideas
<swkhan> i'd invite you, but you'd have to take a plane... =p
<azonenberg> One that i came up with a long time ago but never tried
<azonenberg> i even have the coated wafer, just need to actually etch
<azonenberg> and lol
<azonenberg> Yeah, kinda on the wrong side of the continent :p
<swkhan> the chromium mask?
<azonenberg> no
<azonenberg> The Cr mask has to wait until i get up to campus next week to do the thick Cr film
<azonenberg> This one is older but i never actually tested
<azonenberg> Ta2O5 plus Cu:Cr stack
<azonenberg> use the metal as a mask for HF etch of the oxide
<azonenberg> then use the oxide as a mask for KOH of the silicon
<azonenberg> i have the three-film wafer sitting on a shelf but never actualy did anythign with it
<swkhan> i'll talk to you later azonenberg. i'm going to ask my professor if he knows what happens to the wafer as well. i'll double check the office before i go
<swkhan> honestly, if i don't find it in a week, i'm just going to use one our spares and thermally grow the oxide in atmosphere
<azonenberg> Lol that works
<swkhan> bye azonenberg =)